Helium supply, Multiple cryo-torr cryopump connections, Caution – Olicom 9600 User Manual
Page 36: Helium line connections, Multiple cryo-torr cryopump connections -13, Helium line connections -13, Splitter box located at compressor) -13, Ti cryogenics, Multiple cryo-torr cryopump connections caution
9600 Compressor Installation, Operation, and Maintenance
P/N 8040540
3-13
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Figure 3-7: Alternative Multiple On-Board Cryopump or Waterpump Installation
(Splitter Box located at Compressor)
Multiple Cryo-Torr Cryopump Connections
CAUTION
Make sure the Compressor power is OFF before making any
connections to the rear panel.
Helium Line Connections
CAUTION
The use of several compressors on a single manifold feeding a common
supply header and a common return header requires special
precautions. Contact CTI-CRYOGENICS for a review of the intended
installation and for specific technical instructions.
The use of a 9600 compressor on a manifold with other
CTI-CRYOGENICS compressor models requires a reduction of the
helium charge pressure to 200 - 210 psig charge pressure to avoid
helium safety valves from inadvertently venting. Refer to Section 4 -
Operation and Section 5 - Maintenance for more information.
HELIUM SUPPLY
HELIUM RETURN
WATER
POWER
ON-BOARD POWER CABLES
REMOTE
ON-BOARD
SPLITTER
BOX