INFICON MPG40x ATM to Ultra-High Vacuum Gauge - Manual (Page 2)

Internal volume ≈ 20 cm³
Pressure ≤ 10 bar (absolute),
limited to inert gases
Temperatures
Operation 2)
Bakeout
Pirani filament
Storage
+5…+55 °C
150 °C (without electronics
and magnetic shielding)
120
°C
-40…+65 °C
Relative humidity ≤80% at temperatures
≤+31°C decreasing to 50%
at +40°C
Use indoors only
altitude up to 2000 m
Type of protection IP 40
Dimensions [mm]
18
DN 25 ISO-KF
18
.5
DN 40 ISO-KF
DN 40 CF-F
24
92
ш 63.5
28
55
60
75
10
5
32
55
60
75
15
.5
ш 63.5
Weight
351-010
351-011
351-012
≈700 g
≈720 g
≈980 g
351-020
351-021
351-022
≈730 g
≈750 g
≈1010 g
Measuring Signal vs. Pressure
Pressure p
1E+04
1E+02
1E+00
U [V]
0.00.5 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.5
1E–02
1E–04
1E–06
1E–08
sen
sor
er
ror
un
der
ran
ge
ove
rra
nge
sen
sor
er
ror
Pa
mbar
torr
p = 10 1.667U-d
Measurement signal U [V]
p = 10 1.667×U-d ⇔ U = c + 0.6log
10
p
mbar Pa Torr
d 11.33 9.33 11.46
c 6.8 5.6 6.875
valid in the range 5×10 -9 mbar
3.8×10 -9 Torr
5×10 -7 Pa 5 Pa
2) MPG401: Up to 150 °C at the flange if mounted horizontally;
without magnetic shielding
Gas Type Dependence
10 2
8
6
4
2
10 1
8
6
4
2
10 0
8
6
4
2
10 –1
8
6
4
2
10 –2
p (mbar)
p
eff
(mbar)
10 –3 2 4 6 10 –2 2 4 6 10 –1 2 4 6 10 0 2 4 6 10 1 2 4 6 10 2
H
2
He Ne
Xe
Ar
Freon 12
Water
vapor
Air
O2
CO
N2
Kr
Indication range
>10
-2 mbar)
CO
2
p (mbar)
6
4
2
6
4
2
6
4
2
10 –4
8
6
4
2
He
Ar
Air
N2
O2
CO
10 –5
8
6
4
2
10 –6
10 –3
8
10 –2
8
10 –1
8
Indication range
10
-6 ... 10 -1 mbar
p
eff
(mbar)
10 -6 2 4 6 10 -6 2 4 6 10 –4 2 4 6 10 -3 2 4 6 10 -2 2 4 6 10 -1
In the range below 10 -5 mbar, the pressure indication is
linear.
For gases other than air, the pressure can be determined by
means of a simple conversion formula:
p
eff
= K × pressure reading
Gas type Air
(O
2
, CO, N
2
)
Xe Kr Ar H
2
Ne He
K (mean
values) 1.0 0.4 0.5 0.8 2.4 4.1 5.9
Installation
Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm
caused by escaping process gases can result if
clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum sys-
tem is pressurized. Use the type of clamps which
are suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Pro-
cess media can thus leak and possibly damage
your health.
Use O-rings provided with an outer centering
ring.
DANGER
The gauge must be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:
• CF connections fulfill this requirement.
• For gauges with a KF flange, use a conduc-
tive metallic clamping ring
Caution
Caution: vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with one's
bare hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
WARNING
WARNING: electric arcing
Helium may cause electric arcing with detrimen-
tal effects on the electronics of the product.
Before performing any tightness tests put the
product out of operation and remove the elec-
tronics unit.
The gauge may be mounted in any orientation. To
keep condensates and particles from getting into the
measuring chamber preferably choose a horizontal
to upright position and possibly use a seal with a
centering ring and filter.
When making a CF flange connection, it can be
advantageous to temporarily remove the electronics
and the magnet unit (
→ Operating Manual
tina48e1).
Remove the protective lid and install the product at the
vacuum system.
Hex. socket
AF 1.5
Protective lid
AF 7
Keep the protective lid.
t i ma 4 8 e 1 - a (2008-10)
Original: German tima48d1-a (2008-10)