INFICON HPG400 ATM to High-Vacuum Gauge - Manual (Page 2)

Materials on the vacuum side
Housing, supports,
screens
Feedthroughs
Insulator
Cathode
Cathode holder
Pirani element
stainless steel
NiFe nickel plated
glass
iridium, yttrium oxide (Y
2
O
3
)
molybdenum, platinum
tungsten, copper
Internal volume ≤20 cm 3 (DN 25 ISO-KF)
≤30 cm 3 (DN 40 CF-R)
Pressure max. ≤5 bar (absolute)
Admissible temperatures
Storage
Operation
Bakeout
–20 … +70 °C
0 … +50 °C
150 °C (without electronics
unit,
→  [1])
Relative humidity
Year's mean
During 60 days
≤65% (not condensable)
≤85% (not condensable)
Use indoors only
altitude up to 2000 m NN
Degree of protection IP 30
Dimensions [mm]
4-40UNC 2B
DN 25 ISO-KF
353-520, 353-521
353-525, 353-527
DN 40 CF-R
4-40UNC 2B
3) 353-522, 353-523
353-526, 353-528
3)
3) Gauges with DeviceNet connector are 14 mm longer
( →  [1] or [2]).
Weight
353-520, 353-521
353-522, 353-523
353-525, 353-527
353-526, 353-528
285 g
550 g
430 g
695 g
Measuring Signal vs. Pressure
ove
rra
nge
1E+03
1E+02
1E+01
1E+00
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 2.0 3.0 4.0 5.0 6.0 7.0 9.0
1E–01
1E–02
1E–03
1E–04
1E–05
1E–06
8.0
10.2
10.0
Pressure p [mbar]
Measuring signal U [V]
Measuring range hot cathode
p = 10 U - c1 ⇔ U = c1 + log p
Measuring range Pirani
p = 10 (4 × (U - c2)) ⇔ U = c2 + 0.25 log p
U p c1 c2
[V] [mbar] 7.5 9
[V] [Torr] 7.625 9.031
[V] [Pa]
5.5 8.5
Where p
U
c1, c2
pressure
measuring signal
constant (depending
on pressure unit)
Valid in range
Hot cathode
Pirani 1.50 V ≤ U ≤ 7.50 V
8.50 V ≤ U ≤ 9.75 V
Gas Type Dependence
Hot cathode measuring range
For gases other than air, the pressure in the measuring
range p < 10
-1 mbar can be determined by a simple
conversion:
p
eff
= K × pressure indicated
Where Gas type K (mean values)
Air (N
2
, O
2
) 1.0
Xe 0.4
Kr 0.5
Ar 0.8
H
2
2.4
Ne 4.1
He 5.9
Pirani measuring range
p (mbar)
10 2
8
6
4
2
10 1
8
6
4
2
10 0
8
6
4
2
10 –1
8
6
4
2
10 –2
H
2
He Ne
Air
N
2 O
2 CO
10 –3 2 4 6 10 –2 10 –1 10 0 10 1 10 2 8 2 4 6 8 2 4 6 8 2 4 6 8 2 4 6 8
Water vapor
p
eff
(mbar)
Indication range
above 10
-2 mbar
Xe
Kr
Ar
CO
2
Freon 12
Installation
Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm
caused by escaping process gases can result if
clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum sys-
tem is pressurized. Use the type clamps which
are suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures.
Process media can thus leak and possibly
damage your health.
Use O-rings provided with an outer centering
ring.
DANGER
DANGER: protective ground
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:
• CF connection fulfill this requirement
• For gauges with a KF flange, use a conduc-
tive metallic clamping ring
Caution
Caution: vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
The gauge may be mounted in any orientation. To
keep condensates and particles from getting into the
measuring chamber, preferably choose a horizontal
to upright position.
The gauge is supplied with a built-in baffle.
t i ma 3 1 e 1 - b (2011-10)
Original: German tima31d1-b (2011-10)