INFICON SKY CDG100D 0.1 ... 1000 Torr / mbar - Manual (Page 13)

tina52e1-d (2014-02) 13
Grounding concept → "Power Connection"
Materials exposed to vacuum ceramics (Al
2
O
3
≥99.5%),
stainless steel AISI 316L
Internal volume ≤4.2 cm
3
Admissible pressure (absolute)
200 / 500 / 1000 / 1100 F.S.
1 / 2 / 5 / 10 / 20 / 50 / 100 F.S.
0.1 / 0.25 / 0.5 F.S.
3 bar
2 bar
1.3 bar
Bursting pressure (absolute) 6 bar
Admissible temperatures
Storage
Operation
Bakeout –40 °C … +65 °C
+10 °C … +50 °C
≤110 °C at the flange
Relative humidity ≤ 80% at temperatures
≤ +31 °C, decreasing to 50%
at +40°C
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 40