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2 technical data – INFICON SKY CDG100D 0.1 ... 1000 Torr / mbar User Manual

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tina52e1-d (2014-02)

2 Technical

Data

For further technical data for gauges with DeviceNet,

Profibus or EtherCAT interface

→  [5], [6], [7].

Measurement range

→ "Validity"

Accuracy

1)

≤0.5 Torr/mbar F.S.
≥1 Torr/mbar F.S.


0.4% of reading
0.2% of reading

Temperature effect on zero

≤0.5 Torr/mbar F.S.
≥1 Torr/mbar F.S.


0.0050% F.S./ °C
0.0025% F.S./ °C

Temperature effect on span

0.02% of reading / °C

Resolution

0.003% F.S.

Gas type dependence

none

Output signal analog
(measurement signal)

Measurement range

0 … +10 V

Voltage range

–5 … +10.24 V
(limited to +10.24 V)

Relationship voltage-pressure

linear

Output impedance

0

Ω (short-circuit proof)

Loaded impedance

>10 k

Ω

Response time

2)

≥0.25 Torr/mbar (F.S.)
0.1 Torr/mbar (F.S.)


30 ms
130 ms

Identification

Resistance R

Ident

Voltage


13.2 k

Ω referenced to

supply common
≤5 V

1)

Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C

ambient operating temperature without temperature effects after
operation of 2 h.

2)

Increase 10 … 90 % F.S.R.