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Installation, Measuring signal vs. pressure, Gas type dependence – INFICON BCG450 ATM to Ultra-High Vacuum Triple Gauge User Manual

Page 2: Vacuum connection, P = 10, C × pressure indicated

background image

Atmosphere switching
function (relay "Atmosphere
reached")
BCG450


BCG450-SD/-SP

Atmospheric pressure
threshold programmable via
serial interfaces (

→ [1])

threshold value programma-
ble via RS232 (default value
99%)
threshold value programma-
ble via fieldbus interfaces
(

→ corresponding communi-

cation protocols).

RS232C interface (BCG450)

Data rate
Data format




Connector


9600 Baud
binary
8 data bits
one stop bit
no parity bit
no handshake
→ "Power Connection"

Further information on the RS232C interface

→ [1]

Display (353-552, 353-553)

LCD matrix, 32×16 pixels

Background illumination

two colors red/green

Dimensions

16.0 mm × 11.2 mm

Pressure units

mbar (default), Torr, Pa
(Selecting the pressure unit
→ [1])

Supply

DANGER

The gauge must only be connected to power
supplies, instruments or control devices that
conform to the requirements of a grounded pro-
tective extra-low voltage (SELV). The connection
to the gauge has to be fused

1)

.

Voltage at gauge

+24 VDC (+20 … +28 VDC)
(ripple

≤2 V

pp

)

2)

Power consumption

Standard
Degas
Emissions start (200 ms)


≤0.5 A
≤0.9 A
≤1.4 A

Fuse required

1)

1.25

AT

Power consumption

≤18 W (BPG450)

Electrical connection

D-Sub, 15-pin, male

Sensor cable

shielded, number of con-
ductors depending on the
functions used (max.
15 conductors plus shield-
ing).

Cable length (24 VDC
(conductor cross-section)

≤35 m (0.25 mm²)
≤50 m (0.34 mm²)
≤100 m (1.0 mm²)

For operation with
RS232C interface


≤30 m

Materials on the vacuum side

Housing, supports,
screens
Feedthroughs
Insulator
Cathode
Cathode holder
Pirani element
Diaphragm
Sensor electrodes



stainless steel
NiFe nickel plated
glass
iridium, yttrium oxide (Y

2

O

3

)

molybdenum
tungsten, copper
ceramic (Al

2

O

3

)

SnAg

Internal volume

DN 25 ISO-KF
DN 40 CF-R


≈24 cm

3

≈34 cm

3

Maximum admissable
pressure


5 bar (absolute)

Admissible temperatures

Storage
Operation
Bakeout


–20 … +70 °C
0 … +50 °C
+80 °C (at vacuum connec-
tion, without electronics unit,
horizontally mounted)

Relative humidity

Year’s mean
During 60 days


≤65% (not condensable)
≤85% (not condensable)

Use indoors

only

altitude up to 2000 m NN

Mounting orientation

any

Type of protection

IP 30

1)

INFICON gauge controllers fulfill these requirements.

2)

Measured at the sensor cable connector (consider the voltage

drop on the sensor cable).

Dimensions [mm]

DN 25 ISO-KF

DN 40 CF-R

4-40UNC 2B

4-40UNC 2B

Weight

353-550 / -552 / -561
353-551 / -553
353-554 / -557 / -562
353-556 / -558

≈305 g

≈565 g

≈445 g

≈710 g


Measuring Signal vs. Pressure

1E+01

1E–01

1E–03

1E–05

1E–07

1E–09

1E+03

Measuring signal U[V]

0.0

1E+04

1E+02

1E+00

1E–02

1E–04

1E–06

1E–08

1E–10

1.0

2.0

3.0

4.0

5.0

6.0

7.0

8.0

9.0

10.0

Pressure p [mbar]

In

a

dmis

sib

le

ran

ge

S

ens

or

er

ro

r

In

ad

m

is

sible ra

ng

e

p = 10

(U-7.75)/0.75+c

U p c

[V] [mbar] 0
[V] [Pa] 2
[V] [Torr]

-0.125

where p pressure

U measuring

signal

c

constant (pressure unit dependent)


Gas Type Dependence

Indicated pressure (gauge calibrated for air)

10

2

8

6
4

2

10

1

8

6
4

2

10

0

8

6
4

2

10

–1

8

6
4

2

10

–2

8

6
4

2

10

–3

10

–4

2

4 6

10

–3

2

4 6

10

–2

2

4 6

2

4 6

10

0

2

4 6

10

1

10

–1

10

–4

p

eff

[mbar]

2

4 6

10

2

2

4 6

10

3

8

6
4

2

10

3

p [mbar]

8

6
4

2

4

2

2

Air, O

2

, CO, N

2

He
Ar

Pirani

sensor

Cross-

over

range

Capacitance

diaphragm

sensor

Calibration factors

(Gauge calibrated for air)

p

eff

= C × pressure indicated


Valid for Pirani pressure range 2×10

-2

… 1 mbar:

Gas
type

Calibration

factor C

Gas

type Calibration

factor C

He
Ne

Ar
Kr

Xe

0.8
1.4
1.7
2.4
3.0

H

2

air, O

2

, CO, N

2

CO

2

H

2

O vapor

freon 12

0.5
1.0
0.9
0.5
0.7



Valid for BA pressure range

≤5×10

-3

mbar:

Gas
type

Calibration

factor C

Gas

type Calibration

factor C

He
Ne

Ar
Kr

Xe

5.9
4.1
0.8
0.5
0.4

H

2

air, O

2

, CO, N

2

2.4
1.0

(Indicated factors are average values.)




Installation

Vacuum Connection

DANGER

DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm
caused by escaping process gases can result if
clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum sys-
tem is pressurized. Use the type clamps which
are suited to overpressure.

DANGER

DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures.
Process media can thus leak and possibly
damage your health.
Use O-rings provided with an outer centering
ring.

DANGER

DANGER: protective ground
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:
• CF connection fulfill this requirement
• For gauges with a KF flange, use a conduc-

tive metallic clamping ring


t i ma 4 0 e 1 - b

(2011-04)

Original: German tima40d1-b (2011-04)