INFICON Cool Drawer Single Sensor - Manual (Page 29)

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PN
07
4-
60
9-
P1
A
Cool Drawer Single and Dual Sensors Operating Manual
2.1.3 Sensor Installation with a Q-pod
™
or STM-2
™
Deposition Monitor
1 Connect one end of the 15.2 cm (6 in.) BNC cable (PN 782-902-011) to the
BNC connector on the feedthrough.
2 Connect the other end of the 15.2 cm (6 in.) BNC cable to the connector on
Q-pod or STM-2.
3 Connect one end of the USB cable (PN 068-0472) to the mating connector on
Q-pod or STM-2.
4 Connect the other end of the USB cable to a USB port on the computer used
to operate Q-pod or STM-2.
5 Install the crystal as instructed by section 4.4 on page 4-10 .
6 Launch the appropriate monitor software.
7 Set density at 1.00 g/cm 3 .
8 Zero thickness.
9 The display should indicate 0 or ±0.001 kÅ.
Crystal life should read from 95% to 100%.
The green indicator on Q-pod should be illuminated.
All STM-2 error indicators should be extinguished.
10 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 kÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
If the above conditions are observed, the sensor is in proper working order and may
be installed.
2.2 General Guidelines
Figure 2-1 shows the typical installation of an INFICON water-cooled crystal
sensor in the vacuum process chamber. Use the illustration and the following
guidelines to install the sensor for optimum performance and convenience.