Sigma – INFICON SQC-122C Thin Film Deposition Controller Communications Manual User Manual
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In the example the P term is displayed as an integer, so no conversion is
required. However, the I Term is displayed with one decimal digit (i.e.
2.5). A Get response of 25 actually represents a parameter value of 2.5.
Similarly, a Set value of 25 for the I Term sets its value to 2.5.
Get/Set System Parameters
Command:
B
Description: Get/Set the values shown on the System Parameters screen.
Parameters: Period_SystemTool_XtalTool1_XtalTool2_SimMode
_MinFreq_MaxFreq _Scale1_Scale2_DevGraph
Example:
To Get the system parameters, send: B?
The return string would be of the form:
0.25 100 100 100 0 5.000 6.000 10.0 -10.0 20
To Set the system parameters send:
0.25 100 100 100 0 5.000 6.000 10.0 -10.0 20
Get/Set Process Parameters
Command:
C
Description: Gets/sets the three process parameters – Name, Number of Layers, First
Layer. You must not alter the Number of Layers and First Layer
parameters!
Parameters: Process#_Name_NumberLayers_FirstLayers
Example:
To Get Process 1 name, send: C1?
The return string would be of the form: Process 1 1 3
To Set the parameter, send: C1YourName 1 3
Note: The name must be sent as 15 characters. Process#’s higher than 9
require the use of an ASCII table. The letter “9” is ASC(58), the next letter in the
ASCII table is “:”, ASC(59) – Process10. Process 11 is “;” ASC(60), etc.