INFICON SQC-122C Thin Film Deposition Controller Communications Manual - Manual (Page 11)

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Σ
Sigma
instruments
Set Run State
Command: U
Description: Sets the instruments operating state.
Parameters:
0 = Start Process 5 = Force Final Thickness
1 = Stop Process 6-30 = Start Process 1-25
2 = Start Layer 31 = Soak/Hold
3 = Stop Layer 32 = Zero Thickness
4 = Next Layer 33 = Zero Time
Example: To start process 2, send: U7
Get Run State
Command: V
Description: Returns the Phase of the active process.
Parameters:
0 = Stopped 8 = Ramp 2 16 = Feed Ramp
1 = Crystal Verify 9 = Soak 2 17 = Feed Soak
2 = Initialize Layer 10 = Soak Hold 18 = Idle Ramp
3 = Manual Start Layer 11 = Shutter Delay 19 = Start Next layer
4 = Pocket Rotate 12 = Deposit 20 = Crystal Fail
5 = PreCond 13 = Rate Ramp 21 = Stop Layer
6 = Ramp1 14 = Rate Ramp Deposit 22 = Manual Power
7 = Soak 1 15 = Timed Power 23 = Pocket Timeout
Example: To read the run state, send: V
The return string for the Deposit Phase is: 12