INFICON STC-2000A Thin Film Deposition Controller Quick Start Guide, Sequencing - Manual (Page 5)

STC-2000A Quick Start Guide
Sycon Instruments, Inc . 5
6757 Kinne Street
• East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
instruments
Basic Operation Flow Chart:
To perform a practice run of X thickness at
X rate:
REVIEW
PROCESSES
menu:
Enter parameters,
select Film
NEXT Process
menu:
Enter
Process ID no.*
REVIEW
SOURCE
SENSOR (SS)
MAP menu:
Select output,
tooling and sensor
values
REVIEW FILM
menu:
Enter Film
parameters, select
MAP
Power On
Make back panel
connections,
check safety
interlocks and
cooling water
Return to
Run-time Screen
(Status key)
Ready to Start
* This can only be done when unit is idle.
Press MENU key
Press "Review SS
Map"
Set SOURCE
MAX PWR to
100%, and CH1
START MODE to
"ACTIVE"
Press BYE to
return to Menu
Screen
Press "REVIEW
FILM"
Set SOAK1 PWR
VALUE to 50%,
PWR RAMP1
TIME to 00:11,
PWR SOAK1
TIME to 00:11,
and MAX
POWER LIMIT to
100%
Press "REVIEW
PROCESSES"
Press BYE to
return to Menu
Screen
Confirm MODE is
AUTO, and THICK
(KA) is 0.111
Press STATUS
key to return to
Run-time Screen
Press START key
to initiate start
sequence
Unit power on,
connected