INFICON STC-2000A Thin Film Deposition Controller Quick Start Guide, Sequencing - Manual

STC-2000A Quick Start Guide
Sycon Instruments, Inc. 1
6757 Kinne Street
• East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
instruments
Sequencing Mode
This guide is a supplement to the STC-2000A User’s Manual (518-031).
WARNING:
Improper operation of this equipment could cause
equipment damage or personal injury.
Read the safety precautions in the user’s manual prior to operating this equipment.
Terms and definitions:
The STC-2000A provides both manual and automatic control of single- or multi-layer film
deposition. Manual mode is often used to set up the system in order to run unattended in the
fully automatic mode.
A film is a set of user-programmable deposition-related parameters (density, Z-ratio, map,
etc.) Typically, one material deposition is accomplished per film. The STC-2000A can store up
to 50 films. The active film is the film that will run when the start sequence is initiated. A
process is a set of multiple films, or “layers”. The map specifies the configuration of the
physical plant (number of sensors, selection of source type, which crystal to read, which gun to
use, etc.) Up to 30 maps can be stored to allow multiple system configurations. Each film
specifies which map to use.
The STC-2000A has two basic process control modes: Sequencing mode and Non-
sequencing mode. Non-sequencing mode is used to run a single user-selected film.
Sequencing mode is used to run a process (a series of films) for multiple materials or layers.
The Runtime or Status Screen is the screen normally
displayed during operation. You may return to the Status
Screen at any time by pressing the “Status” button.
Test Mode can be used to check the programming of the STC-2000A. Test Mode simulates
sensors and deposition rates to allow running films without operating the deposition system (in
particular the high-voltage supply) or without having oscillator/sensor attached.
WARNING:
Gun output and all I/O are active in Test Mode.