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INFICON STC-2002 Thin Film Deposition Controller Quick Start Guide User Manual

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STC-2002 Quick Start Guide

Sycon Instruments, Inc.

instruments


The standard unit includes:


DESCRIPTION SYCON

P/N

QTY

Source sensor card (w/ 2 crystal sensor inputs & 1 analog output)

502-193

1

Input card (with 8 inputs)

502-197

1

Output card (with 8 outputs)

502-194

1

Power cord (120 VAC)

600-004

1

Fuses (2 x 2.00A 250VAC F-type)

356-014

2

Opto-coupled inputs 25-pin male connector

402-222

1

Relay outputs 25-pin female connector

404-020

1

EMI hood for 25-pin connectors

404-021

2

RS-232 9-pin male connector

404-011

1

EMI hood for 9-pin connector

404-009

1

Rack mount ears

016-012

2

Rack mount hardware

094-006

4

Manual 518-029

1

Serial communication cable

506-170

1

Hand controller

500-198

1

Communications software tools disk

500-046

1

Quick Start Guide

518-040

1


System Configuration:

The STC-2002 uses a crystal sensor and oscillator to monitor deposition. Connections are
made as shown below. Consult the user’s manual for detailed information.

Oscillator

Crystal Sensor

To STC-2002









Feed-through

STC-2002 Quick Start Guide for Non-Sequencing Mode

SPN 518-040

Effective Date: 25 July 2007

6757 Kinne Street

• East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298

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