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Stc-2002 quick start guide – INFICON STC-2002 Thin Film Deposition Controller Quick Start Guide User Manual

Page 5

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STC-2002 Quick Start Guide

Sycon Instruments, Inc.

instruments



Basic Operation Flow Chart:

To perform a practice run of X thickness at
X rate:


Press MENU key

Press "Review SS

Map"

Set SOURCE

MAX PWR to

100%, and CH1

START MODE to

"ACTIVE"

Press BYE to

return to Menu

Screen

Press "REVIEW

FILM"

SS MAP Select 1

Set SOAK1 PWR

VALUE to 50%,

PWR RAMP1

TIME to 00:11,

PWR SOAK1

TIME to 00:11,

and MAX

POWER LIMIT to

100%

Press STATUS

key to return to

Run-time Screen

Press START key

to initiate start

sequence

Unit power on,

connected

NEXT FILM menu:

Enter

Film ID no.

REVIEW SS MAP

menu:

Select outputs,

tooling, sensor

values

REVIEW FILM

menu:

Enter Film

parameters, select

MAP

Power On

Check back panel

connections,

safety interlocks

and cooling water

Return to

Run-time Screen

(Status key)

Ready to Start

MENU screen:

Press

NEXT FILM

Edit Map 1

Edit Film 1

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• East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298