Brooks Instrument SLAMf Series - Manual (Page 27)

2-3
Section 2 - Installation Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks ® Digital MFC's and MFM's
2-8 In-Line Filter
It is recommended that an in-line filter be installed upstream from the mass
flow controller or meter to prevent the possibility of any foreign material
entering the flow sensor or control valve (MFC). The filtering element
should be replaced periodically or ultrasonically cleaned.
Table 2-1 below lists recommended filter sizes for a range of flow rates
2-9 Installation
Recommended installation procedures:
a. The Brooks Smart II Digital MFC or MFM should be located in a clean,
dry atmosphere relatively free from shock and vibration.
b. Leave sufficient room for access to Self-zero function push-button.
c. Install in such a manner that permits easy removal if the instrument
requires servicing.
d. The Brooks Smart II Digital MFC or MFM can be installed in any position.
However, mounting in orientations other than the original factory
calibration (see calibration data sheet supplied with the instrument) can
result in a ±0.2% maximum full scale shift after re-zeroing.
Models Maximum Flow Rate Recommended Filter
SLAMf50/60 100 ccm 2 micron
SLAMf50/60 500 ccm 2 micron
SLAMf50/60 1 to 5 lpm 10 micron
SLAMf50/60 10 to 30 lpm 40 micron
SLAMf51/61 10 to 100 lpm 40 micron
SLAMf53/63 > 100 lpm Consult factory
Note: Brooks provides many filter options. For those not listed here, please consult factory.
Table 2-1 Recommended Filter Size