Brooks Instrument SLAMf Series - Manual (Page 14)

1-8
Section 1 - Introduction Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks ® Digital MFC's and MFM's
Figure 1-4 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to
0.5 % Per Second Setpoint Change
DEFAULT = CAL# 1 (External resistor not installed)
CAL Resistor Value (k ohms) CAL Resistor Value (k ohms)
1 Not Installed 6 124
2 Shorted 7 80.6
3 665 8 52.3
4 324 9 30.9
5 191 10 15
Table 1-3 Analog I/O Pin Connections:
Table 1-2 Calibration Select Signal
Function PIN
Setpoint, Common Input (-) 1
Flow Signal, 0(1) -5 volt, Output (+) 2
TTL Alarm, open collector, Output (+) 3
Flow Signal, 0(4)-20 mA, Output (+) 4
Power Supply, +13.5 Vdc to +27 Vdc(+) 5
Not Connected 6
Setpoint, 0(4)-20 mA, Input (+) 7
Setpoint, 0(1)-5 Vdc, Input (+) 8
Power Supply, Common (-) 9
Flow Signal, Common, Output, (-) 10
Reference, +5 Vdc, Output (+) 11
Valve Override, Input 12
Calibration Select Input 13
RS-485 Common B (-) 14
RS-485 Common A (+) 15