Brooks Instrument SLAMf Series - Manual (Page 18)

1-12
Section 1 - Introduction Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks ® Digital MFC's and MFM's
Figure 1-5 Analog, DeviceNet and F OUNDATION Fieldbus Terminal Layouts
Analog I/O Pin Function PIN
Setpoint, Command Input (-) 1
Flow Signal, 0(1) -5 volt, Output (+) 2
TTL Alarm, open collector, Output (+) 3
Flow Signal, 0(4)-20 mA, Output (+) 4
Power Supply, +13.5 Vdc to +27 Vdc(+) 5
Not Connected 6
Setpoint, 0(4)-20 mA, Input (+) 7
Setpoint, 0(1)-5 Vdc, Input (+) 8
Power Supply, Common (-) 9
Flow Signal, Common, Output, (-) 10
Reference, +5 Vdc, Output (+) 11
Valve Override, Input 12
Calibration Select Input 13
RS-485 Common B (-) 14
RS-485 Common A (+) 15
DeviceNet Terminal Layout
PC-based Support Tools
Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our
customers. Smart DDE may be used with any unit supporting RS-485 in a multidrop configuration, thus allowing
users to control and monitor their Brooks devices. The Brooks Service Tool
TM (BST) may be used to monitor,
diagnose, tune and calibrate Brooks devices equipped with DeviceNet or F OUNDATION Fieldbus communications.
The Brooks Service Tool TM interfaces with Brooks products via a special service port.
F OUNDATION Fieldbus Terminal Layout
Analog Terminal Layout