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Brooks, Model 5860 i, Figures – Brooks Instrument 5860i User Manual

Page 6: Tables

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ii

Brooks

®

Model 5860

i

Contents

Installation and Operation Manual

X -TMF-5860i-MFM-eng

Part Number:541B110AAG

November, 2008

Figures

Figure

Page

Number

Number

1-1

Typical Response to Flow Step Changes .......................... 1-2

2-1

Model 5860

i Dimensions ................................................... 2-2

2-2

"D" Type Connector Pin Arrangement ............................... 2-2

2-3

Maximum Allowable Loop Resistance ............................... 2-3

2-4

Common Electrical Hook-Ups ........................................... 2-6

3-1

Flow Sensor Operational Diagram .................................... 3-2

3-2

Model 5860

i Calibration Connections ................................ 3-4

3-3

Adjustment Potentiometer Location ................................... 3-4

3-4

Fast Response Adjustment ............................................... 3-4

3-5

PC Board Jumper Location and Function .......................... 3-6

5-1

Model 5860

i Parts Drawing ............................................... 5-2

Tables

Table

Page

2-1

Recommended Filter Size ................................................. 2-5

4-1

Bench Troubleshooting ...................................................... 4-2

4-2

Sensor Troubleshooting ..................................................... 4-2

4-3

Conversion Factors (Nitrogen Base) ................................. 4-7

4-4

Restrictor Selection Guide ................................................ 4-11

5-1

Model 5860

i Replacement Parts List ................................. 5-3

5-2

Tool and Spare Part Kits for 5860

i .......................................... 5-3