Brooks Instrument 5860i - Manual (Page 26)

Brooks ® Model 5860 i
4-2
Section 4 Maintenance
Installation and Operation Manual
X-TMF-5860i-MFM-eng
Part Number: 541B110AAG
November, 2008
Trouble Possible Cause Check/Corrective Action
Output stays at 0 Volts Clogged Sensor. Clean sensor. Refer to cleaning procedure. Section 4-2.
regardless of flow.
Output signal stays at +6.8V Defective PC Board. Replace PC Board. Refer to Section 4-4.
and there is no flow through
the meter.
Defective Sensor. Replace Sensor Assembly. Refer to Section 4-4.
Meter grossly out of calibration. Partially clogged sensor. Clean sensor, refer to the cleaning procedure. Section 4-2.
Flow is higher than indicated.
Meter grossly out of calibration. Partially clogged restrictor. Replace restrictor. Refer to Section 4-4.
Flow is lower than indicated.
Meter output oscillates. Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-4.
Faulty pressure regulator. Check regulator output.
Defective PC Board. Replace PC Board. Refer to Section 4-4.
Table 4-1 Bench Troubleshooting
Table 4-2 Sensor Troubleshooting