Linear vacuum encoder system diagram, With linear scale, Ssyysstte em m v viie ew w – MicroE 3500V Mercury User Manual
Page 4: Eexxp pa an nd de ed d v viie ew w
Mercury 2000V & 3000V Encoder System
with Linear scale
Flying Leads (to be connected to inside of
vacuum chamber pass through connector)
Sensor
(shown attached to a
linear slide base with
mounting bracket)
S
Syysstte
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m V
Viie
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w
Glass Scale
SmartPrecision electronics
module (interpolator)
Vacuum chamber wall
E
Exxp
pa
an
nd
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ed
d V
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w
Scale benching edge
End locator pin
End index mark
Sensor mounting holes (2)
Bracket mounting holes (2)
Optional sensor benching pins (3)
Single
shielded
cable
Center index
mark
Typical user-supplied
sensor mounting bracket
Top reflective linear scale
Detail A
Male 15 pin
high density
D-sub
connector
Thumb screw
Index/Calibration
button
Mounting screws & flat washers
(2 needed per screw)
Page 2
Scale reference datum;
example shown with
benching pins
Detail A
Mounting bracket
screws (2)
Double shielded “pigtail” cable from
vacuum wall to electronics
Flying Leads, customers are responsible for
connector selection and installation
Power/Calibration
indicator
Signal & alignment
indicators
Vacuum chamber wall