Kaman SMU9200 - Manual (Page 24)

SMU-9000 User Manual 21
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Part IV: System Performance
Applications Summary
The SMU-9000 is versatile enough to satisfy the most demanding
OEM performance and packaging requirements for non-contact
position measuring systems in a wide range of applications. The
cost effective SMU-9000 provides the user extremely high
measurement performance which is customizable to the
application. These are a few of the many applications where the
SMU-9000 is operating today.
Stage Position Measurement and Alignment
Applications
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Optical alignment systems
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Liquid crystal display manufacturing equipment
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Semiconductor mask alignment for step and repeat systems
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Scanning electronic microscope - vertical axis positioning
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Atomic force microscopy - vertical axis positioning
Polishing and Grinding Manufacturing
Applications
•
Thickness and position measurement for disk drive,
semiconductor wafers, and optics
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Fine positioning for parts grinding and precision machining
Mirror Positioning
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Mirror steering for pointing and tracking systems
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Vibration suppression and control systems
Material Testing and Data Collection
Applications
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Material compression testing
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Mechanical structure creep detection
Miscellaneous
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Arthroscopic surgical console over-pressure warning
•
Chemical vapor deposition (CVD) system set up and
alignment verification
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Magnetic bearing suspension control systems
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Aircraft rivet height inspection