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1 operating specifications, Full scale ranges, 10, 20, 100, 200, and 1000 torr – Brooks Instrument CMC Series User Manual

Page 12: 5% of reading, 01% of full scale, 005% full scale/degree c, 027% full scale/degree c, 20 msec, Inconel, 45 psia

1 operating specifications, Full scale ranges, 10, 20, 100, 200, and 1000 torr | 5% of reading, 01% of full scale, 005% full scale/degree c, 027% full scale/degree c, 20 msec, Inconel, 45 psia | Brooks Instrument CMC Series User Manual | Page 12 / 36 1 operating specifications, Full scale ranges, 10, 20, 100, 200, and 1000 torr | 5% of reading, 01% of full scale, 005% full scale/degree c, 027% full scale/degree c, 20 msec, Inconel, 45 psia | Brooks Instrument CMC Series User Manual | Page 12 / 36
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