Atec VIC-MS-60 - Manual (Page 2)

Vacuum Instrument Corporation
2099 Ninth Avenue • Ronkonkoma NY 11779 • Tel 631 737 0900 • Fax 631 737 1541
www.vicleakdetection.com • email [email protected]
REVF090210
* Performance determined in accordance with American Vacuum Society Standards; Specifications subject to change without notice.
©2009 Vacuum Instrument Corporation; ®VIC Leak Detection is a registered trademark and the VIC symbol and the MS-(series) are trademarks of Vacuum Instrument Corporation.
MS●60 PERFORMANCE SPECIFICATIONS
Characteristics Units 7 CFM 10.6 CFM
Sensitivity, vacuum * 5.0 x 10
-12
Sensitivity, sniffing 1.0 x 10 -8
Leak Measurement Range
atm-cc/sec
5.0 x 10
-12
to 1.0 x 10
-4 (10 w/ext pump)
Leak Ranging - Auto/Manual
Start-up time minutes <3
Response Time * seconds <2 direct
Resolution for 4 He * - 14
Mass Spectrometer Tube - 180° deflection; dual-magnetic sector
Auto-tuning - Yes
Auto-calibration - Internal – yes; External - manual
Auto-zeroing - Yes, 3 modes: Normal, Spray and Hold
Reject set-point - Yes
Built-in calibrated leak - Yes
NIST traceable - Yes
Temperature compensated - Yes
He Scan - Yes
Filaments - 2 - Lanthanum/Yttrium
Maximum Operating Pressure Torr 7.5, 760 w/ext roughing option
Display - Alpha/Numeric
Units - atm cc/s, mbar*l/s, Pa*M 3 /sec
I/O -
0-5V or 0-10V chart; Linear Mantissa and Exponent or Logarithmic LR
and Port Pressure and Foreline Pressure
Digital I/O (PLC interface) - 6-output, 7-input
Printer Port - Yes
RS-232C - Yes
Software - Password security, 3-mode auto-zero
VACUUM SYSTEM
Vacuum Mode - Direct, reverse or combination flow
Roughing Pump cfm 7 rotary vane 10.6 rotary vane
High Vacuum Pump liters/second 61 turbomolecular
Vacuum Gauging - Pirani: Test port & foreline; Ion: High vacuum
Test Port Connection - NW25
PHYSICAL
Dimensions (W x H x D) Inches (cm) 21 x 16.9 x 16.5 (53.3 x 42.9 x 41.9)
Weight lbs. (kg) 133 (60.3) 135 (61.2)
ELECTRICAL
Power V/Hz/A 115/50-60/8; 230-240/50-60/5; 100/50-60/8