Atec VIC-MS-50 - Manual (Page 2)

Vacuum Instrument Corporation
2099 Ninth Avenue • Ronkonkoma NY 11779 • Tel 631 737 0900 • Fax 631 737 1541
www.vicleakdetection.com • email [email protected]
REVF090211
* Performance determined in accordance with American Vacuum Society Standards; Specifications subject to change without notice.
©2008 Vacuum Instrument Corporation; ®VIC Leak Detection is a registered trademark and the VIC symbol and the MS-(series) are trademarks of Vacuum Instrument Corporation.
Characteristics Units MS-50 MS-50 Dry MS-50 Dry HS
Sensitivity, vacuum * 3.0 x 10
-11
3.0 x 10
-12
Sensitivity, sniffing 1.0 x 10
-08
Leak Measurement Range
atm cc/sec
3.0 x 10
-11
to 10 3.0 x 10
-12
to 1.0 x 10
-5
Leak Ranging - Auto/Manual
Start-up Time minutes <3
Response Time *
seconds
<2 direct, <2.5 reverse <2
Resolution *
-
14 at mass 4
Gross Test, Time
(with UFT Option)
seconds 3 (100 mTorr)
Fine Test, Time
(with UFT Option)
seconds 10 (25 mTorr, 10
-10
atm-cc/sec)
Mass Spectrometer Tube - 180° deflection, dual magnetic sector
Auto-tuning - Yes
Auto-calibration - Internal: Yes / External: Manual
Auto-zeroing - Yes
Reject Set-point - Yes
Built-in Calibrated Leak
-
Yes; 10
-08
range Yes; 10
-09
range
NIST Traceable - Yes
Temperature Compensated - Yes
Scan / Descan - Yes
Filaments - 2 Tungsten
Max Operating Pressure
Torr
7.5 fine; 100 gross 0.200
Display inches (cm) 15 (38.1) LCD flat panel display
Units - cc/second, mbar*l/second, Pa*M 3 /second
I/O - 0~5V chart, parallel printer
Printer Port - Yes
RS-232C - Yes
Software - 50 programmable test recipes
Vacuum System
Vacuum Mode - Direct, reverse or combination Direct
Roughing Pump cfm 16 direct drive 10 scroll pump
Foreline Pump - 7 direct drive 5 dual stage diaphragm/molecular drag
High Vacuum Pump liters/second 61 turbo
Vacuum Gauging
-
Pirani: Test Port and Foreline / Ion: High Vacuum
Cold Trap - N/A N/A Optional
Physical
Dimensions (W x H x D) inches (cm) 25.75 x 30.625 x 35.25 (65.40 x 77.79 x 89.54)
Test Cup, UFT Option ( ∅ x D) inches (cm) 4.5 x 1.0 (11.4 x 2.5)
Test Port Connection inches 1.125
Weight lbs. (kg) 475 (215.45)
Electrical
Power V/Hz/A 115/50-60/30; 230-240/50-60/15; 100/50-60/30
MS•50 PERFORMANCE SPECIFICATIONS