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Ms●40 performance specifications – Atec VIC-MS-40 User Manual

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Vacuum Instrument Corporation

2099 Ninth Avenue • Ronkonkoma NY 11779 • Tel 631 737 0900 • Fax 631 737 1541
www.vicleakdetection.com

email

[email protected]

REV090716

* Performance determined in accordance with American Vacuum Society Standards; Specifications subject to change without notice.
©2009 Vacuum Instrument Corporation; ®VIC Leak Detection is a registered trademark and the VIC symbol and the MS-(series) are trademarks of Vacuum Instrument Corporation.




MS●40 PERFORMANCE SPECIFICATIONS

Characteristics

Units

MS-40

Sensitivity, vacuum *

4.0 x 10

-11

Sensitivity, sniffing

6.0 x 10

-10

Leak Measurement Range

atm-cc/sec

10 x 10

-4

to 4.0 x 10

-11

(10 x 10

-3

to 4.0 x 10

-11

w/ext pump)

Leak Ranging

-

Auto/Manual

Start-up time

minutes

<3

Response Time *

seconds

<2 direct, <3 reverse

Resolution for

4

He *

-

14

Mass Spectrometer Tube

-

180° deflection; dual-magnetic sector

Auto-tuning

-

Yes

Auto-calibration

-

Internal – yes; External - manual

Auto-zeroing

-

Yes

Reject set-point

-

Yes

Built-in calibrated leak

-

Yes

NIST traceable

-

Yes

Temperature compensated

-

Yes

He Scan

-

Yes

Filaments

-

2 - Tungsten

Maximum Operating Pressure

Torr

7.5, 760 w/ext roughing option

Display

-

Alpha/Numeric

Units

-

atm cc/s, mbar*l/s

Background Compensation

-

Continuous automatic compensation for system background

Testable Masses

-

3 and 4

Printer Port

-

Yes

RS-232C

-

Yes

Remote Control Unit

- Yes

VACUUM SYSTEM

Vacuum Mode

-

Direct, reverse or combination flow

Roughing Pump

cfm

1.2 Mechanical Foreline/Rouging Pump

High Vacuum Pump

liters/second

61 turbomolecular

Vacuum Gauging

-

Pirani: Test port & foreline; Ion: High vacuum

Test Port Connection

-

NW25

PHYSICAL

Dimensions (W x H x D)

Inches (cm)

20.5 x 15 x 14 (52.7 x 38.1 x 35.6)

Weight

lbs. (kg)

87 (39.5)

ELECTRICAL

Power

V/Hz/A

115/50-60/8; 230-240/50-60/5; 100/50-60/8