Atec Sloan-Dektak-I User Manual
Page 2
DESCRIPTION
SECTION I
GENERAL INFORMATION
The Sloan Dektak Surface Profile Measuring System, consisting of
the
Dektak and associated chart recorder,
is
identified as Sloan
Part Number 900050.
The instrument is used for the measurement
o_` surface profiles and surface elevation differences, or
step
heights,
from less
than
25 angstrom units to a
maxinum of 1,000,0(0
angstrom units.
The
equivalents of these values are 0.1 microincr
to 0.0039 inch.
In
addition, the instrument provides for magnifi-
cation of horizontal dimensions of a profile from
2X to 5,000X.
It- is simple to use,
portable,
and ruggedly constructed for
long-
term,
dependable operation in an industrial
environment:;
The Dektak
is
Figure 1-1.
Recordings of sample
sur-
face profiles are reproduced in Figure 1-2.
The sample_whose.profile
is-to be scanned rests on the stage beneaih
the
sensing head.
The stage can be adjusted manually to level the
surface of the sample: The sensing head contains a diamond
stylus
with a tracking force preset at approximately 50 milligrams
(O.OOii
euzce).
The stylus tracking force can be changed to meet the needs
of various applications by a screw adjustment located behind the-
se_nsing head.
The sensitivity of the instrument can be selected from seven levels
ranging from 1,000 angstrom units to 1,000,000
angstrom units full
scale; each level is represented by a selector button on the front
panel.
Three profile scanning speeds, regulated at 0.01, 0.1, and
1 centimeter per minute
can.also be
selected
from the front panel.
In addition, a manual over-ride
function provides rapid traverse,
both forward
and revers.e, to expedite
preliminary scan, rescan, and
sanple
positioning.
The sensing head is equipped with a 40-power
microscope with integral illumination for direct observation of the
sa=le.