Brooks Instrument 5851E - Manual (Page 6)

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Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Brooks ® Model 5851E
Figure Page
Number Number
1-1 Command Steps, Soft Start Disabled ............................ 1-2
1-2 100% Command Step, Soft Start Enabled ..................... 1-2
2-1 Model 5851E Dimensions .............................................. 2-3
2-2 Model 5851E Card Edge Connector Comparison Guide 2-4
2-3 Model 5851E Card Edge Connector Hookup Diagram .. 2-5
2-4 D-Connector Pin Arrangement ...................................... 2-5
3-1 Flow Sensor Operational Diagram ................................. 3-2
3-2 Flow Control System Block Diagram ............................. 3-3
3-3 Card Edge PC Board Jumper Location & Function ........ 3-4
3-4 D-Connector PC Board Jumper Location & Function .... 3-5
3-5 Model 5851E Calibration Connections ........................... 3-7
3-6 Adjustment Potentiometer Location ............................... 3-8
3-7 Fast Response Adjustment .......................................... 3-11
4-1 Torque Sequence for the Valve Retainer Plate .............. 4-7
4-2 Valve Adjusting Spacer Locations .................................. 4-9
4-3 Voltmeter Connections for Valve Adjustment ................ 4-10
4-4 Example Nomograph .................................................... 4-17
4-5 Restrictor Element Assembly ........................................ 4-20
4-6 Restrictor Element Orientation in Controller Body ......... 4-20
5-1 Model 5851E Parts Drawing .......................................... 5-2
Tables
Table Page
Number Number
2-1 Recommended Filter Size ............................................. 2-6
4-1 Bench Troubleshooting .................................................. 4-3
4-2 Sensor Troubleshooting ................................................. 4-4
4-3 Conversion Factors (Nitrogen Base) ............................ 4-12
4-4 Orifice Sizing Nomograph ............................................. 4-15
4-5 Restrictor Selection Guide ............................................ 4-19
5-1 Model 5851E Replacement Parts List ............................ 5-3
5-2 Tools and Spare Part Kits for Model 5851E ................... 5-4