Cascade Microtech Pyramid Probes - Manual (Page 7)

PN 153-690-3 www.cascademicrotech.com Pyramid Probes: New Core Inspection • 7
Beams
Are there any cracked beams?
Cracked beams are not acceptable on new
cores.
Is beam slope greater than 5 μm?
Beam slope greater than 5um on new
cores is not acceptable. See the
Pyramid Probe Core User Manual for
more details on beam slope
measurement procedure.
Cracked beam, not acceptable Cracked beam, not acceptable
Beam slope <5μm Beam slope <5μm
Pyramid Probes: New Core Inspection