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Pyramid probes: new core inspection – Cascade Microtech Pyramid Probes User Manual

Page 7

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Pyramid Probes: New Core Inspection • 7

Beams

Are there any cracked beams?

Cracked beams are not acceptable on new

cores.

Is beam slope greater than 5 μm?

Beam slope greater than 5um on new

cores is not acceptable. See the

Pyramid Probe Core User Manual for

more details on beam slope

measurement procedure.

Cracked beam, not acceptable Cracked beam, not acceptable

Beam slope <5μm

Beam slope <5μm

Pyramid Probes: New Core Inspection