Cascade Microtech InfinityQuad Probe Pad Layout Rules User Manual
Infinityquad probe: pad layout rules, Rule 100: pad size

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InfinityQuad Probe PAD Layout Rules • 1
Rule 100: Pad Size
Minimum pad sizes are shown in
and
.
The longer dimension on the rectangular pad represents the direction of probe scrub. To provide for probing ease and
parasitics low enough for many applications, use 100 x 100 µ pads for 150 µ pitch and above, unless there is a reason to
do otherwise. Increase pad size when using an autoprober to account for errors. The recommended amount of increase
depends on the station and the type of measurement. As a general rule, however, increase the pad size by 5 µ in both
length and width.
Table 1. Minimum pad size rule in 5 µ increments (units in µ x µ).
N
OTE
Recommended minimum pad sizes include error margins for automated measurements (on
a Cascade Microtech semi-automatic station) and over temperature probing (-40° to
+125°C).
# of Contacts
(include X)
75 µ
pitch
80 µ
pitch
100 µ
pitch
125 µ
pitch
150 µ
pitch
200 µ
pitch
250 µ
pitch
4
25 x 45
5
6
7
8
9
10
30 x 50
11
12
13
14
15
16
35 x 55
17
18
19
40 x 60
20
21
22
23
45 x 65
24
25
i
InfinityQuad Probe: Pad Layout Rules
Quick Reference Guide
Document Outline
- Rule 100: Pad Size
- Rule 101: Passivation Window
- Rule 102: Number of Contacts and Pad Pitch
- Rule 103: Corner Pads Allowed
- Rule 104: Single-Row Pad Spacing
- Rule 105: Parallel-Row Pad Spacing
- Rule 106: Pad Height Variation
- Rule 107: Planarity Requirements
- Rule 108: Pads at 90° Only
- Rule 109: Pads are collinear
- Rule 110: Pads Have Equal Pitch
- Rule 111: Pads on Top
- Rule 112: Maximum DUT Size for MicroChamber TopHat Compatibility