Cascade Microtech EPS200RF Package Flyer - Manual

BENEFITS
Make everyone an RF expert
Best-known methods for highest
measurement accuracy
Ensure calibration accuracy
WinCal XE – the only RF on-wafer calibration
software
Enable testing of cutting-edge technologies
Ability to probe smallest RF pads and lowest
pitches
Protect your investment for the future
Re-configure and upgrade as requirements
grow
Minimize training efforts
Designed for convenience and ease of use
The EPS200RF is a dedicated advanced probing solution that comes
with everything you need to achieve accurate measurement results in
the shortest time, with maximum confidence. The system incorporates
best-known methods for RF probing up to 67 GHz, with the ability to
probe pads as small as 25 μm x 35 μm and beyond.
A very rigid and stable system design of the EPS200RF, with cast frame
and single platen with four-point support, allows you to achieve high
accuracy. An integrated vibration-isolation solution protects contact
quality over measurement time. Optimized optics, backlash-free
X-Y-Z movement of RF positioners, and a contact separation drive with
outstanding 1 μm repeatability, enable precise probe placement and
contact repeatability comparable to semi-automated systems. Industry-
benchmark cables support the highest magnitude and phase stability of
measurements. Choose a pair of 40, 50, or 67 GHz RF probes from our
Infinity Probe®, |Z| Probe®, ACP and FPC probe families for the best
contact performance. With WinCal XE™ software, you receive patented
LRRM and LRM+ methods for the best calibration accuracy. Verified
standards and optimized calibration boundary conditions allow you to
achieve a repeatable metrological level of calibration and confidence in
your measurement results.
An intuitive operation workflow with the innovative fine-glide chuck
stage which offers both wide-range coarse movement and µm-level
fine movement, contact gauge, integrated auxiliary chuck supported by
WinCal XE wizards and tutorials, ensures ease of operation and short
time to data for both the novice and the expert user.
Designed for upgradability with multiple options, the EPS200RF can be
easily reconfigured to meet your future project requirements.
EPS 200RF
A complete 200 mm manual
probing solution for RF
applications up to 67 GHz