K-Patents PR-33-S - Manual (Page 30)

26 PR-33-S instruction manual
Document/Revision No. Rev. 1.4 Effective: May 15, 2015
6 Regular maintenance
6.1 Preventive replacement of o-ring in EKC265 application
The amine based chemical solvent EKC265 is formulated to remove post-etch residue
from the wafer. K-Patents Semicon Process Refractometer is widely used to monitor
the water content of the solvent. Field studies and experience have shown that the
o-ring between the refractometer instrument body and flow cell has limited lifetime in
EKC265. The current standard o-ring material is a perfluoroelastomer of Kalrez 6375,
manufactured by Dupont, and this material has shown swelling after 6 months in use.
Preventive maintenance replacement of the o-ring PR-9252 every 6 months will en-
sure equipment reliability and prevent o-ring failure.
Figure 6.1 Replacing the O-ring