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Bronkhorst IN-FLOW User Manual

Page 7

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BRONKHORST HIGH-TECH B.V.

TABLE OF CONTENTS

1

Introduction ................................................................................................................................................... 9

1.1

General description ................................................................................................................................ 9

1.1.1

Gas flow .......................................................................................................................................... 9

1.1.2

Liquid flow ....................................................................................................................................... 9

1.1.3

Pressure ......................................................................................................................................... 9

1.1.4

Housings ......................................................................................................................................... 9

1.1.5

Valves ........................................................................................................................................... 11

1.2

Sensor principles ................................................................................................................................. 12

1.2.1

Gas flow sensors (by-pass measurement) ................................................................................... 12

1.2.2

Gas flow sensors (direct mass flow measurement, CTA based) ................................................. 12

1.2.3

Liquid flow sensors ....................................................................................................................... 12

1)

The

µ

-FLOW model for flowrates up to 2 g/h. ......................................................................................... 12

2)

The CTA based LIQUI-FLOW model for flow rates up to approximately 1000 g/h. ................................ 13

1.2.4

Pressure sensor ........................................................................................................................... 13

1.3

Valve principles .................................................................................................................................... 13

1.3.1

Solenoid valve............................................................................................................................... 13

1.3.2

Vary-P valve .................................................................................................................................. 13

1.3.3

Pilot operated valve ...................................................................................................................... 14

1.3.4

Bellows valve ................................................................................................................................ 14

1.4

K

v

-value calculation .............................................................................................................................. 14

1.4.1

For gases ...................................................................................................................................... 14

1.4.2

For liquids ..................................................................................................................................... 15

1.4.3

Maximum pressure drop ............................................................................................................... 16

1.5

Sensors and laminar flow devices ....................................................................................................... 16

1.6

Conversion factors ............................................................................................................................... 17

1.6.1

Gas conversion factors (by-pass measurement) .......................................................................... 17

1.6.2

Gas Conversion Factors (direct mass flow measurement, CTA-based) ...................................... 18

1.6.3

Liquid Conversion Factors ............................................................................................................ 19

1.6.4

Software for conversion factor calculation .................................................................................... 19

2

Installation ................................................................................................................................................... 20

2.1

Receipt of equipment ........................................................................................................................... 20

2.2

Return shipment ................................................................................................................................... 20

2.3

Service ................................................................................................................................................. 20

2.4

Mounting .............................................................................................................................................. 21

2.5

In-line filter ........................................................................................................................................... 21

2.6

Fluid connections ................................................................................................................................. 21

2.7

Piping ................................................................................................................................................... 22

2.8

Electrical connections .......................................................................................................................... 22

2.9

Caution ................................................................................................................................................. 22

2.10

Supply pressure ............................................................................................................................... 23

2.11

System purging ................................................................................................................................ 23

2.12

Seals ................................................................................................................................................ 23

2.13

Equipment storage ........................................................................................................................... 23

2.14

Electromagnetic compatibility ........................................................................................................... 23

2.14.1

Conditions for compliance with EMC requirements ...................................................................... 23

3

OPERATION ............................................................................................................................................... 25

3.1

General ................................................................................................................................................ 25

3.2

Power and warm-up ............................................................................................................................. 25

3.3

Zeroing ................................................................................................................................................. 25

3.4

Start-up ................................................................................................................................................ 26

3.5

Operating conditions ............................................................................................................................ 26

3.6

Instrument performance ....................................................................................................................... 26

3.6.1

Sensors ......................................................................................................................................... 26

3.6.2

Controllers .................................................................................................................................... 26

3.7

Manual operation ................................................................................................................................. 26

3.8

Analog operation .................................................................................................................................. 27

3.9

BUS / digital operation ......................................................................................................................... 27

4

Maintenance ................................................................................................................................................ 28

4.1

General ................................................................................................................................................ 28

4.2

Gas flow sensor ................................................................................................................................... 28

See also other documents in the category Bronkhorst Hardware: