Nor-Cal RS Series Differentially Pumped Rotary Platforms - Manual (Page 4)

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PUMP REQUIREMENTS AND ORIENTATION
PUMPING PORTS/STAGES
There are two ports for pumping the RS. They are located about the circumference and are terminated with mini (1.33”) ConFlat flanges.
The ports are etched with the labels “1st stage” and “2nd stage”. The markings are found on the mini flange perimeters. Remove the protective caps if you have
not done so already.
HOWEVER, NEVER ALLOW THE TWO PUMPING PORTS LOCATED ON THE PERIMETER TO REMAIN UNCOVERED, PARTICULATE CONTAMINATION
MAY OCCUR, CAUSING SEAL FAILURE.
PUMP TYPE AND SPEED REQUIREMENTS
Minimum pumping to meet specifications:
First stage: >1.6 CFM at < 10 microns
Connect a roughing pump to the first stage port flange. The roughing system must have a pumping speed of 1.6 CFM or greater AT THE PORT FLANGE, and be
capable of achieving a vacuum base pressure of at least 10 microns, MEASURED AT THE PORT FLANGE. The platform should be protected from backstreaming
oil or other contaminants with suitable traps.
Second stage: > 2 l/s at <10-6 Torr
CONNECT A HIGH VACUUM PUMP to the SECOND STAGE PORT FLANGE. The high vacuum system must have a pumping speed of 2 l/s or
greater AT THE PORT FLANGE, and be capable of achieving a vacuum base pressure of at least 5 x 10 -(8) Torr, MEASURED AT THE RS
PUMPING PORT FLANGE.
A Nor-Cal Products RS roughing manifold kit model # RS-MFD will facilitate the assembly and roughing procedure. For information please
refer to the attached RS accessories sheet.
Care must be taken to insure that significant pump speed losses due to conductance restrictions do not occur by using long lengths of small
diameter tubing to connect suitable pumps.