Bird Technologies VIP System - Manual

The Bird VIP System is a tool for measuring voltage, current and the phase angle between these parameters
in complex applications. The VIP System is Bird Technologies’ solution to the semiconductor market to provide
more information than traditional VI probe instruments . Each calibrated system is comprised of a sensor
that attaches in-situ in the RF feed line, a receiver that performs the data conversion and communicates to
your workstation, and a data cable that connects the sensor to the receiver.
Using a streamlined architecture, the VIP System is able to measure and report voltage, current, and phase
angle at multiple fundamental, harmonic and intermodulation frequencies. With this data, power and
impedance are calculated at each frequency, giving users the ability to identify small discrepancies that
may make the difference between a successful and a failed process. This makes the VIP System an incredible
tool for repeating high precision processes.
System
PROBLEMS } SOLUTIONS
Simultaneous Measurements of Multiple RF Generators
} Up to 3 fundamental frequencies can be measured
simultaneously with a single VIP system. This feature aids
in developing repeatable processes, troubleshooting
components and identifying process drifts.
Complex Waveform Plot
} Proprietary architecture maintains correct phase angle
information between the fundamental and harmonics.
This feature helps to ensure that a repeatable and identical
RF spectrum is delivered to the wafer.
APPLICATIONS
Chamber to Chamber Matching.
Waveform Reconstruction enables chamber comparisons to
identify large and small changes.
Impedance Matching can reveal problems such as poor RF
connections, worn electrodes and changes in the process gas
mixture.
Harmonic Levels up to 150 MHz are available for analysis.
V, I, Phase and Delivered Power Comparison.