Mdc-361c, Film deposition controller – INFICON MDC-361C Thin Film Deposition Controller User Manual
Page 3
S U P P L E M E N T T O T H E M D C - 3 6 0 C M A N U A L
MDC-361C
Film Deposition Controller
IPN 628411 Rev. C
www.inficon.com [email protected]
Due to our continuing program of product improvements, specifications are subject to change without notice.
©2007 INFICON
®
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