Ped), Emc), Esd) – Brooks Instrument MT3809G User Manual
Page 57: Bulgarian
A-1
Section A Essential Instructions
Installation and Operation Manual
X-VA-MT3809G-MT3810G-eng
Part Number: 541B182AAG
September, 2013
Models MT3809G & MT3810G
!
Brooks Instrument
,
,
.
,
,
.
,
Brooks Instrument.
,
,
,
,
.
,
.
,
.
-
.
:
,
.
/
.
,
Brooks Instrument
.
,
.
.
.
: (1)
.
. (2)
.
,
.
.
,
Brooks Instrument
.
,
.
,
.
,
,
,
.
:
,
,
.
,
.
(PED)
0,5 bar (g)
-
25 mm
1" (
),
(PED).
„
”
PED
.
97/23/
.
Brooks Instrument
1.
-
25 mm
1" (
)
I, II
III
PED.
25 mm
1" (
),
-
,
(SEP).
(EMC)
(
/
)
Brooks Instrument
(
EMC 2004/108/EC).
,
,
.
,
:
Brooks Insturment
,
CE
.
,
,
100%-
.
„D”
„
”
.
.
360°.
.
.
100%-
,
CE
.
.
:
.
(ESD)
:
,
.
,
.
:
1.
.
2.
,
,
.
3.
.
.
,
,
.
:
,
(ESD)
.
,
-
(NMOS, SMOS . .).
,
.
,
.
Bulgarian