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Brooks, Digital mfc's & mfm's – Brooks Instrument SLA5800 Series User Manual

Page 18

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1-12

Brooks

®

Digital MFC's & MFM's

Section 1 Introduction

Installation and Operation Manual

X-TMF-SLA5800-MFC-eng

Part Number: 541B027AAG

April, 2013

Figure 1-8 Model SLA5851D Digital I/O DeviceNet MFC

Figure 1-7 Model SLA5850F Digital I/O F

OUNDATION

Fieldbus MFC with Coplanar Valve