RKI Instruments GD-K71D User Manual
Page 46

PT2E-1052
45
Detection gas
Chemical
formula
Detection
range
Preset
alarm level
(standard)
Applicable
filter
Phosphorus
Trichloride
PCl3
HCl
0∼15
ppm
5
ppm M
Phosphorus
Trifluoride
PF3
0∼10
ppm
2 ppm
M
Silane SiH4
0∼15
ppm
5 ppm
M.B
Silicone
Tetrachloride
SiCl4
HCl
0∼15
ppm
5
ppm M
Silicone
Tetrafluoride
SiF4
HF
0∼9
ppm
3 ppm
M
Sulfur Tetrafluoride SF4
HF
0∼9
ppm
3 ppm
M
Tantalum Fluoride
TaF5
HF
0∼9
ppm
3 ppm
M
Tin Tetrachloride
SnCl4
HCl
0∼15
ppm
5 ppm
M
Trichlorosilane SiHCl3 HCl 0∼15
ppm
5 ppm
M
Tungsten
Hexachloride
WCl6
HCl
0∼15
ppm
5 ppm
M
Tungsten
Hexafluoride
WF6
HF
0∼9
ppm
3 ppm
M
*For gases not listed above, contact us or our nearest agent.
*M : Millipore type filter B : Balston type filter
*Gases which have “HCL(HF)” in the box of detection range are
hydrized by moisture in air, and detected by becoming HCL(HF).
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