RKI Instruments GD-K71D User Manual
Page 45

PT2E-1052
44
Detection gas
Chemical
formula
Detection
range
Preset
alarm level
(standard)
Applicable
filter
Ammonia NH3
0∼75
ppm
25 ppm
M
Antimony
Pentachloride
SbCl5
HCl
0∼15
ppm
5
ppm M
Arsenic
Pentachloride
AsCl5
HCl
0∼15
ppm
5 ppm
M
Arsenic
Pentafluoride
AsF5
HF
0∼9
ppm
3
ppm M
Arsenic Trichloride AsCl3
HCl
0∼15
ppm
5 ppm
M
Arsenic Trifluoride
AsF3
HF
0∼9
ppm
3 ppm
M
Arsine AsH3
0∼0.2
ppm
0.05
ppm M.B
Boron Tribromide
BBr3
HBr
0∼9
ppm
3 ppm
M
Boron Trichloride
BCl3
HCl
0∼15
ppm
5
ppm M
Boron Trifluoride
BF3
HF
0∼9
ppm
3
ppm M
Bromine Br2
0∼1
ppm
0.2 ppm
M
Chlorine Cl2
0∼1.5
ppm
0.5 ppm
M.B
0∼1
ppm
0.2 ppm
M
Chlorine Trifluoride CIF3
0∼0.6
ppm
0.1 ppm
M
Diborane B2H6 0∼0.3
ppm
0.1 ppm
M
Dichlorosilane SiH2Cl2 HCl 0∼15
ppm
5
ppm M
Disilane Si2H6 0∼15
ppm
5
ppm M.B
Fluorine F2
0∼3
ppm
1 ppm
M
Germane GeH4 0∼0.8
ppm
0.2 ppm
M.B
Germanium
Tetrachloride
GeCl4
HCl 0∼15
ppm
5 ppm
M
Hydrogen Bromide
HBr
0∼9
ppm
3 ppm
M
Hydrogen Chloride
HCl
0∼15
ppm
5 ppm
M
Hydrogen Fluoride
HF
0∼9
ppm
3 ppm
M
Hydrogen Iodine
Hl
0∼5
ppm
2
ppm M
Hydrogen Selenide
H2Se
0∼0.2
ppm
0.05 ppm
M.B
Iodine I2
0∼1
ppm
0.3 ppm
M
Molybdenum
Pentachloride
MOCl5
HCl
0∼15
ppm
5
ppm M
Molybdenum
Hexafluoride
MOF6
HF
0∼9
ppm
3 ppm
M
Nitrogen Dioxide
NO2
0∼15
ppm
5 ppm
M.B
0∼1
ppm
0.3 ppm
M
Ozone O3
0∼0.6
ppm
0.1 ppm
M
Phosphine PH3
0∼1
ppm
0.3 ppm
M.B
Phosphorus
Oxychloride
POCl3
HCl
0∼15
ppm
5 ppm
M
Phosphorus
Pentachloride
PCl5
HCl
0∼15
ppm
5 ppm
M
Phosphorus
Pentafluoride
PF5
HF
0∼9
ppm
3 ppm
M
TYPICAL DETECTION GASES AND APPLICABLE FILTERS(EXAMPLE)