Aalborg AFC - Manual (Page 2)

TABLE OF CONTENTS
1. UNPACKING THE AFM/AFC MASS FLOW METER.....................
1.1 Inspect Package for External Damage.........................................
1.2 Unpack the Mass Flow Meter/Controller.......................................
1.3 Returning Merchandise for Repair...............................................
2. INSTALLATION............................................................
2.1 Primary Gas Connections............................................................
2.2 Electrical Connections.................................................................
3. PRINCIPLE OF OPERATION..............................................
4. SPECIFICATIONS...........................................................
4.1 AFM 26/36/46 Mass Flow Meters.................................................
4.2 AFC 26/36/46 Mass Flow Controllers..........................................
4.3 CE Compliance............................................................................
5. OPERATING INSTRUCTIONS.............................................
5.1 Preparation and Warm Up...........................................................
5.2 Flow Signal Output Readings.......................................................
5.3 Swamping Condition...................................................................
5.4 Set Point Reference Signal (AFC)................................................
5.5 TTL, Valve OFF Control (AFC)......................................................
5.6 Valve Test/Purge (AFC)................................................................
6. MAINTENANCE............................................................
6.1 Introduction.................................................................................
6.2 Flow Path Cleaning......................................................................
6.2.1 Restrictor Flow Element (RFE).................................................
6.2.2 AFM 26 and AFC 26 models.....................................................
6.2.3 AFM 36/46 and AFC 36/46 models..........................................
6.2.4 Valve Maintenance (AFC).........................................................
7. CALIBRATION PROCEDURES..............................................
7.1 Flow Calibration..............................................................................
7.2 Calibration of AFM Mass Flow Meters............................................
7.2.1 Connections and Initial Warm Up..........................................
7.2.2 ZERO Adjustment.................................................................
7.2.3 SPAN Adjustment.................................................................
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