Flow ranges – Aalborg AFC User Manual
Page 11
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FLOW RANGES
TABLE I AFM 26 AND AFC 26 LOW FLOW MASS FLOW METER/CONTROLLERS*
TABLE II AFM 36 AND AFC 36 MEDIUM FLOW MASS FLOW METER/CONTROLLERS*
TABLE III AFM 46 AND AFC 46 HIGH FLOW MASS FLOW METER/CONTROLLERS*
*
Flow rates are stated for Nitrogen at STP conditions [i.e. 70
F
F (21.1
F
C) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
8
CODE
scc/min [N
2
]
CODE
std liters/min [N
2
]
01
0 to 10
07
0 to 1
02
0 to 20
08
0 to 2
03
0 to 50
09
0 to 5
04
0 to 100
10
0 to 10
05
0 to 200
06
0 to 500
CODE
standard liters/min [N
2
]
11
0 to 15
30
20
31
30
32
40
33
50
CODE
standard liters/min [N
2
]
40
60
41
80
42
100
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