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Flow ranges – Aalborg AFC User Manual

Page 11

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FLOW RANGES

TABLE I AFM 26 AND AFC 26 LOW FLOW MASS FLOW METER/CONTROLLERS*

TABLE II AFM 36 AND AFC 36 MEDIUM FLOW MASS FLOW METER/CONTROLLERS*

TABLE III AFM 46 AND AFC 46 HIGH FLOW MASS FLOW METER/CONTROLLERS*

*

Flow rates are stated for Nitrogen at STP conditions [i.e. 70

F

F (21.1

F

C) at 1 atm].

For other gases use the K factor as a multiplier from APPENDIX 2.

8

CODE

scc/min [N

2

]

CODE

std liters/min [N

2

]

01

0 to 10

07

0 to 1

02

0 to 20

08

0 to 2

03

0 to 50

09

0 to 5

04

0 to 100

10

0 to 10

05

0 to 200

06

0 to 500

CODE

standard liters/min [N

2

]

11

0 to 15

30

20

31

30

32

40

33

50

CODE

standard liters/min [N

2

]

40

60

41

80

42

100

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