Alicat MC Series Mass Flow Controller - Manual (Page 59)

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Technical Data for MCV & MCVS Mass Flow Controllers
0 to 0.5 sccm Full Scale through 0 to 20 slpm Full Scale
The Alicat MCV mass flow controller is designed for applications that require tight shut-off such as vacuum
coating and sputtering processes. An integrated pneumatic shut-off valve is normally closed and provides
positive shut-off of 1 x 10 -9 atm scc/sec Helium max.
MCVS controllers are for use with aggressive gases.
Performance MCV Mass Flow Controller MCVS Mass Flow Controller
Accuracy at calibration conditions
after tare
± (0.8% of Reading + 0.2% of Full Scale)
High Accuracy at calibration conditions
after tare
± (0.4% of Reading + 0.2% of Full Scale)
High Accuracy option not available for units ranged under 5 sccm.
Repeatability ± 0.2% Full Scale
Zero Shift and Span Shift 0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown Ratio 0.5% to 100% Full Scale / 200:1 Turndown 1% to 100% Full Scale / 100:1 Turndown
Maximum Controllable Flow Rate 102.4% Full Scale
Typical Response Time 100 ms (Adjustable)
Warm-up Time < 1 Second
Integrated Valve Leak Integrity 1 x 10 -9 atm scc/sec Helium max
Standard Specifications (Contact Alicat for available options.)
Operating Conditions MCV Mass Flow Controller MCVS Mass Flow Controller
Mass Reference Conditions (STP) 25ºC & 14.696 psia (standard — others available on request)
Operating Temperature −10 to +50 ºCelsius
Humidity Range (Non–Condensing) 0 to 100%
Maximum Pressure 145 psig
Mounting Attitude Sensitivity None
Valve Type Normally Closed
Ingress Protection IP40
Wetted Materials
MCV: 316L,303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum, Brass, 430FR Stainless Steel, Silicon, Glass, PCTFE.
MCVS: 316LSS, 303SS, 430FRSS, FFKM (Kalrez) standard, Viton, EPDM, Buna, Neo-
prene as needed for some gases.
If your application demands a different material, please contact Alicat.
Communications / Power Whisper MCV & MCVS Mass Flow Controller
Monochrome LCD or Color TFT
Display with integrated touchpad
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
Digital Input/Output Signal 1 Options RS-232 Serial / RS-485 Serial / PROFIBUS 3
Analog Input/Output Signal 2 Options 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Optional Secondary Analog
Input/Output Signal 2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Electrical Connection Options 8 Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6 pin locking
Supply Voltage 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)
Supply Current 0.250 Amp
1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass
Flow, Volumetric Flow, Pressure or Temperature
3. If selecting PROFIBUS, no analog signal is available. PROFIBUS units do not have the display. See PROFIBUS
specifications for PROFIBUS supply voltages and currents. ( www.alicat.com/profibus)
Range Specific Specifications
Full Scale Mass Flow Controller Mechanical Dimensions Process Connections
MCV 0.5SCCM to 20SLPM 4.8”H x 6.8”W x 1.5”D 1/4” VCR® Male
MCVS 0.5SCCM to 20SLPM 5.5”H x 6.8”W x 1.5”D 1/4” VCR® Male
Welded VCR® process connections are recommended for MCV and MCVS applications. Please contact Alicat.