Gentec-EO Accessories for Beam Diagnostics User Manual
Page 18
Accessories for Beam Diagnostics
Revision 1.2
18
Please note that using the Despeckle Filter can slightly reduce the resolution.
Warning
Please note that the minimum measurable beam diameter at a 50% clip level is
approximately 230 µm. Any smaller beam will be significantly broadened by the point
spread function of the phosphor.