Brooks Instrument 5860E - Manual (Page 6)

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Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008 Brooks ® Model 5860E
Contents
Figures
Figure Page
Number Number
1-1 Typical Response to Flow Step Changes ........................... 1-2
2-1 Model 5860E Dimensions .................................................. 2-3
2-2 "D" Type Connector Pin Arrangement ................................ 2-3
3-1 Flow Sensor Operational Diagram ..................................... 3-2
3-2 Model 5860E Calibration Connections ............................... 3-4
3-3 Adjustment Potentiometer Location ................................... 3-4
3-4 Fast Response Adjustment ................................................ 3-4
5-1 Model 5860E Parts Drawing .............................................. 5-2
Tables
Table Page
Number Number
2-1 Recommended Filter Size ................................................. 2-4
4-1 Bench Troubleshooting ...................................................... 4-2
4-2 Sensor Troubleshooting ..................................................... 4-2
4-3 Conversion Factors (Nitrogen Base) .................................. 4-7
4-4 Model 5860E Standard Restrictors .................................... 4-11
5-1 Model 5860E Replacement Parts List ................................ 5-3
5-2 Tool and Spare Part Kits for 5860E .................................... 5-3