Cascade Microtech Pyramid Probes - Manual (Page 2)

PN 153-689-1 www.cascademicrotech.com Off-line Core Cleaning With a Brush• 2
Safety Guidelines
Four-Step Cleaning Process
Step 1: Inspecting the Core
Inspect the core under the microscope for any damage and/or loose particles.
• If loose particles are found, hold an acceptable air nozzle vertical to the probe face,
three inches (75 mm) from the core (see Figure 4 ). Activate the air stream before
approaching the core with the air nozzle, as the nozzle will tend to move forward
even at low pressure. Continue to
Step 2: Preparing the Cleaning Brush .
• If no loose particles are found, go directly to Step 2: Preparing the Cleaning Brush .
Step 2: Preparing the Cleaning Brush
Complete the following steps to ensure that the brush is clean and you are not adding
particles to the membrane or causing damage:
1. Aiming the air nozzle away from the microscope and work area, blow out any
debris in the brush head (see Figure 1 ).
2. Use a squeeze bottle of IPA or methanol to wet the brush (see Figure 2 ), and then
blow out the brush head again (see Figure 1 ).
Step 3: Cleaning With Brush
Complete the following steps to moisten or loosen any particles or residue on the
probe face. Then remove the particles or residue with strokes of the cleaning brush.
1. Use a squeeze bottle of IPA or methanol to re-wet the brush.
2. Hold the brush vertical to the probe face (see
Figure 3 ).
3. Starting from either the left or right side of the probe face (see Figure 3 ), use a
circular motion to clean across the probe face and back again. Use enough force to
feel the probe tips. If the brush tip begins to dry, apply more IPA or methanol. Do
not allow the brush to dry out.
4. Clean the brush again, according to the steps described in Step 2: Preparing the
Cleaning Brush .
5. Re-wet the brush and use smooth brushstrokes to wipe the probe face from edge
to edge. DO NOT use a back and forth motion.
6. Repeat from top to bottom to remove particles from entire probe face.
• Wearing gloves is recommended when handling Pyramid Probe cards.
• Avoid touching the probe face or probe tips with the metal ferrule or handle of the brush.
• Never clean the sides (wings) of the core. Only clean the probe face.
• Use a maximum of 40 psi (275 kPa) air-nozzle pressure on Pyramid Probe cores.
• Before any type of cleaning, always inspect the Pyramid Probe core placed on a flat surface, wafer-side up, under the microscope.
1. Inspect the core using a microscope.
2. Ensure that the brush is clean to avoid causing damage or adding particles to the membrane.
3. Moisten or loosen any particles or residue on the probe face, then remove the particles or residue with strokes of the
cleaning brush.
4. Blow the remaining IPA or methanol (containing particles/residue) away from the probe face.
C AUTION
Do not allow the alcohol to dry between steps 3 and 4.
Figure 1
Figure 2
Figure 3
Figure 4
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Pyramid Probe Core Off-line Cleaning With a Brush