Cascade Microtech P800-S - Manual (Page 7)

PN 151-853-A www.cascademicrotech.com Pyramid Probe Card: P800-S Online Cleaning• 7
9. Determine the optimum overtravel using the same strategy. Start with a larger value and decrease until yield suffers.
Troubleshooting
Troubleshooting your cleaning process depends on the device yield, and the type and amount of contamination found.
Refer to
Table 2 for a summary of the actions to take based on the results.
After setting the initial parameters, allow the system to run for a period, perhaps 10 probing/cleaning cycles. When you
have collected enough data to spot trends, review the device yield.
• If the yield decreases over time, varies cyclically with the cleaning interval, or is lower than expected, refer to Table 2
to increase the cleaning efficiency.
• If the yield is stable and acceptable, consider reducing the cleaning touchdowns per cycle or increasing the interval
between cleanings to verify the settings and optimize the process. See Table 2 below for guidance.
Table 2. Troubleshooting.
Issue Possible Actions
Contamination on tips:
• Metal
• Organic
• Oxide
• Or yield does not recover after cleaning
• Run cleaning cycle 1 or 2 times (100-200 touchdowns)
• Check probe tip height
• Check cleaning media height and planarity
• Check XY step between cleaning touchdowns
• Visually inspect probe marks on cleaning media
• Increase cleaning overtravel if contamination limited to some areas of probe
• Increase touchdowns per cleaning
• Decrease cleaning interval
• Monitor yield closely
Yield drops off between cleanings • Decrease cleaning interval
• Double Z touchdown
Particles around the tips • Brush clean
• Reduce cleaning overtravel
• Clean cleaning media
• Change to a different type of cleaning media
Abrasion on membrane (see Figure 6 ) • Reduce cleaning overtravel
• Check probe tip height
• Check cleaning medium height and planarity
Figure 7. Repeating particle indent, near miss. Figure 6. Lapping film abrasion on membrane.
Online Cleaning Instructions