Cascade Microtech InfinityQuad Probe Pad Layout Rules - Manual (Page 2)

PN 154-631-2 www.cascademicrotech.com InfinityQuad Probe PAD Layout Rules • 2
Table 2. Minimum pad size rule in 1 µ increments (units in µ x µ).
Rule 101: Passivation Window
This rule applies only when the final passivation layer is above the metalization. Minimum passivation window sizes are the
same as minimum pad sizes. Use pad sizes larger than the passivation window whenever possible for reliablity.
To provide
clearance for the probe tip, the distance from the top of the probe pad to the top of passivation layer should not exceed
40 µ.
Rule 102: Number of Contacts and Pad Pitch
It is possible to have between 4 and 25 contacts. Available pitches and recommended maximum operational frequencies
when using the InfinityQuad probe are shown in
Table 3 .
# of Contacts
(include X)
75 µ
pitch
80 µ
pitch
100 µ
pitch
125 µ
pitch
150 µ
pitch
200 µ
pitch
250 µ
pitch
4 25 x 45 26 x 46 26 x 46 26 x 46 26 x 46 27 x 47 28 x 48
5 26 x 46 26 x 46 26 x 46 26 x 46 27 x 47 28 x 48 28 x 48
6 26 x 46 26 x 46 26 x 46 27 x 47 27 x 47 28 x 48 29 x 49
7 26 x 46 26 x 46 27 x 47 27 x 47 28 x 48 29 x 49 30 x 50
8 26 x 46 27 x 47 27 x 47 28 x 48 28 x 48 30 x 50 31 x 51
9 27 x 47 27 x 47 27 x 47 28 x 48 29 x 49 30 x 50 32 x 52
10 27 x 47 27 x 47 28 x 48 28 x 48 29 x 49 31 x 51 32 x 52
11 27 x 47 27 x 47 28 x 48 29 x 49 30 x 50 32 x 52 33 x 53
12 27 x 47 28 x 48 28 x 48 29 x 49 30 x 50 32 x 52 34 x 54
13 28 x 48 28 x 48 29 x 49 30 x 50 31 x 51 33 x 53 35 x 55
14 28 x 48 28 x 48 29 x 49 30 x 50 31 x 51 33 x 53 36 x 56
15 28 x 48 28 x 48 29 x 49 30 x 50 32 x 52 34 x 54 36 x 56
16 28 x 48 29 x 49 30 x 50 31 x 51 32 x 52 35 x 55 37 x 57
17 29 x 49 29 x 49 30 x 50 31 x 51 33 x 53 35 x 55 38 x 58
18 29 x 49 29 x 49 30 x 50 32 x 52 33 x 53 36 x 56 39 x 59
19 29 x 49 29 x 49 31 x 51 32 x 52 34 x 54 37 x 57 40 x 60
20 29 x 49 30 x 50 31 x 51 32 x 52 34 x 54 37 x 57 40 x 60
21 30 x 50 30 x 50 31 x 51 33 x 53 35 x 55 38 x 58 41 x 61
22 30 x 50 30 x 50 32 x 52 33 x 53 35 x 55 39 x 59 42 x 62
23 30 x 50 30 x 50 32 x 52 34 x 54 36 x 56 39 x 59 43 x 63
24 30 x 50 31 x 51 32 x 52 34 x 54 36 x 56 40 x 60 44 x 64
25 30 x 50 31 x 51 32 x 52 34 x 54 36 x 56 40 x 60 44 x 64
InfinityQuad Probe: Pad InfinityQuad Probe: Pad Layout Rules