Cascade Microtech EPS200RF Package Flyer - Manual (Page 2)

ACP Probes, FPC Probes,
Infinity Probes or |Z| Probes
• Your choice of application-optimized
probes for best measurement
accuracy*
Optimal boundary conditions due to
integrated ceramic AUX chuck
EPS 200RF
www.cascademicrotech.com
For more information contact us at 1-800-550-3279 (1-503-601-1000) or email sales_support
@
cmicro.com
© Copyright 2014 Cascade Microtech, Inc. All rights reserved. Cascade Microtech,
Infinity Probe, and |Z| Probe are registered trademarks and WinCal XE is a trademark of
Cascade Microtech, Inc. All other trademarks are the property of their respective owners.
Data subject to change without notice.
EPS200RF_FLYER_1114
Trinocular 6.7x stereo zoom
scope with 20x eyepiece
• Optimized field of view
• Accurate probe placement on
small pads
• Camera-ready
Dedicated RF chuck
• Consistent measurement boundary
conditions over entire wafer
Unique ceramic AUX site
• Homogeneous and optimized
calibration conditions
Solid and stable positioners
• Accurate probe positioning, consistent
contact force and overtravel
Verified calibration standards
• Accurate calibration, verification and
measurement assurance
Contact height gauge
• Precise overtravel adjustment
• Reliable and repeatable
contact quality
Unique chuck stage
• Quick coarse Y/X movement and
sub-micron positioning
• X/Y stepping with independent
axes lock
Tailored RF platen and 40 mm
platen drive
• Precise mount of up to four positioners
• Flexibility for wafer-level and
package test
Unique 400 µm platen contact/
separation drive
• Highest contact accuracy and
consistency over entire wafer
• Convenience and ease of use
Vibration isolation solution
• Stabilizes contact and minimizes
pad damage
Fine Theta adjustment
• Precise probe-to-pad
alignment for small pads
High-quality industry
benchmark 67 GHz cables
• Long lifetime and consistent
measurements
0 20 40 60 80
0.00
0.05
0.10
0.15
eLRRM: Sum of S
ij
Errors
Frequency, GHz
#1
#2
#2
#4
Consistent contact/separation movement Highly repeatable LRRM calibration available
from WinCalXE (included in package)
* The EPS200RF manual probing solution includes: PM8 probe station with a 200 mm chuck stage, a tailored RFplaten, contact height gauge, cast
microscope bridge with 50 x 50 mm scope movement with tilt, stereo zoom microscope with 150x magnification and LED ring-light (camera-ready
C-mount), vibration-isolation solution, special 200 mm RF chuck with ceramic AUX inlay, fine theta adjustment, two RPP305 bolt-down positioners, full
WinCal XE license, choice of two flexible Gore cables (67 GHz /90 cm, 50 GHz / 120 cm or 40 GHz / 120 cm), two 2.4 (f) - 2.92 (m) adapters, ProbePolish
and contact substrate, probe cleaning brush, choice of two RF single-ended ACP Probes, FPC probes, |Z| probes or Infinity probes at 40, 50 or 67 GHz,
with one matching calibration substrate (ISS or CSR), and tools for operation and facility connection. The FPC probes require two adapters (P/N 104-913).
ORDERING INFORMATION
Part Number Description
EPS200RF 200 mm manual probing solution* for RF applications
EPS200RF-LT 200 mm manual probing solution for RF applications, excluding cables, probes and calibration substrate
EPS-ACC-200RF-4P 4-port option for EPS200RF package containing two RPP305 positioners and two N/S RF arms
Contact/Separation Repeatability Test CPW Mag(|S21|), dB Different Media eLRRM: Sum of S
ij
Errors