Nor-Cal PMXYZ Series Precsion Manipulator User Manual
Page 7
High-Vacuum Containment and Control
CONVENTIONAL BAKEOUT:
SUMMARY: The PMXYZ manipulator can be baked with standard UHV bakeout
procedures.
See safety warnings under "Lubrication".
It is not necessary to remove the micrometers prior to standard bakeout. For
high temperature bake-out, or repeated bake-outs of long duration, we do
recommend micrometer removal.
MICROMETER REMOVAL:
1.Position both X & Y micrometers at mid travel. Lower the Z micrometer to it's
minimum.
2. The pre-load coupling to the stage removes by simply un-threading the
knurled collar. The same procedure is used on all X , Y and Z axis micrometers.
Check under "Adjustments" for correct instructions for re-assembly after bakeout.
3. The X & Y micrometers are bolted to the frames with two 1/4-20 SHCS each.
On large drum mics, it may be necessary to loosen a set screw and slide the
inner graduated cylinder into the micrometer outer graduated cylinder in order to
remove the socket head mounting screws. Remove each micrometer. The Z
micrometer is retained by a clamp bolt and a safety snap ring underneath the
traveling stage.
NOTE: We do not recommend stage temperatures exceed 180 degrees C
continuously and 200 degrees C intermittently. The design of the manipulator
allows room around the bellows for thermal insulation, making possible greater
bellows temperatures while not exceeding our recommendations. Under no
condition should heater tapes be used directly on a welded bellows. An electrical
short would not only create a safety hazard, but possibly destroy the vacuum
integrity of the thin bellows wall.
After bake and cool-down, re-attach micrometers.