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Orbital Research MEMS MicroValve Arrays User Manual

Mems microvalve arrays

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Orbital Research, Inc.
4415 Euclid Avenue, Suite 500

leveland, OH 44103-3733

C

Contact: Frederick J. Lisy, Ph.D.

Telephone (216

E-mail [email protected]

) 649-0399

www.orbitalresearch.com

Copyright 2004

MED-03 Rev.

B

03-26-2004

Orbital Research has developed innovative low-power, fast acting,

and low-cost advanced controls and Micro-Electro-Mechanical
System (MEMS) micro-valve technology that provides precise
means to control micro-fluids for a broad rage of applications.
Orbital Research uses MEMS fabrication techniques to

manufacture custom tailored microvalves. These microvalves are
conveniently and densely packed in cassettes which provide
individually controlled outlet ports and operated via a PC using

drive electronics and control-software also developed by Orbital
Research (Figure 1 & 2).

Orbital Research is developing a revolutionary cost-effective
solution for the visually impaired individuals to access
computer/electronic based information (Figure 3a). Orbital
Research’s technology utilizes MEMS based micro-valve technology

to create an 8-dot multiple-lines refreshable Braille display. We

have developed technology that leads to affordable screen interface
displays with increased performance and versatility.

This novel system is being developed (in conjunction with iACTIV)

to have the capability to precisely control dosing and delivery of the
drugs in order to increase the effectiveness in respiratory therapy.

A micro-valve array integrated into a drug reservoir replaces the
conventional atomization systems. The ability to manage particle

size is a strong attribute for SARS, Oncology, and other drugs that
are highly toxic and expensive.

Orbital Research has licensed the microvalve technology to iACTIV

Corporation (www.iACTIVcorp.com) which is currently the
manufacturer and supplier of these MEMS microvalves.

Orbital Research develops and commercializes new and innovative
custom-engineered solutions in advanced controls and micro-

devices for various commercial and military applications. We offer
solutions that target to improve performance and functionality, and

decrease cost-of ownership and manpower reduction needs.

Figure 1. Top-left: photograph of die containing eight microvalves; top-right: photograph of
assembled and packed eight-microvalve system; bottom-left: back view of package showing
valve output port assignments; bottom-right: orthogonal view of package.

Figure 2. Photograph of microvalves

Figure 3a & 3b. Left (Figure 3a): refreshable multi-line Braille display system; right (Figure 3b) :
Microfluidic controller with bidirectional flow capability

Some of our microvalves applications include:

Refreshable Braille Display System

Massively Parallel BioChip Systems

Respiratory Drug Delivery System

Orbital Research is developing densely packed Microfluidic actuator
arrays (Figure 3b) to precisely meter small doses of reagents and

optimize the fluid handling and performance of massively parallel
oligonucleotide and peptide library synthesis systems. Our
technology enables low cost miniaturization and the integration to a

variety of techniques such as high-throughput chemical analysis, cell

fusion, fraction collection, and fast sample mixing. Thus, it becomes
an integral technology component that contributes to converting

microfluidic chips into an economically viable and more accessible

research tool.

MEMS MicroValve Arrays

Low-power micro valves
for pre cision
micro-fl uid ic cont rol