Aalborg XFM Digital User Manual
Page 12

9
*Flow rates are stated for Nitrogen at STP conditions [i.e. 70
F
F (21.1
F
C) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
CODE
scc/min [N
2
]
CODE
std liters/min [N
2
]
00
0 to 5
07
0 to 1
01
0 to 10
08
0 to 2
02
0 to 20
09
0 to 5
03
0 to 50
10
0 to 10
04
0 to 100
05
0 to 200
06
0 to 500
TABLE I XFM 17 LOW FLOW MASS FLOW METER*
TABLE II XFM 37 MEDIUM FLOW MASS FLOW METER*
FLOW RANGES
CODE
std liters/min [N
2
]
30
20
31
30
32
40
33
50
TABLE III XFM XFM 47/57/67/77 HIGH FLOW MASS FLOW METERS*
CODE
std liters/min [N
2
]
40
60
41
80
42
100
50
200
60
500
70
1000